Tracer 2™

Tracer 2™

Der Tracer 2 erfüllt die Anforderung nach einer präzisen, zuverlässigen Prozesskontrolle. Es ist ideal für die Detektion von Spurenfeuchte in Halbleiterfertigungsprozessen, Inert- und Spezialgasen, Komponenten- und Systemtests sowie Laborforschungsanwendungen geeignet.

  • Nachweisgrenze: < 1 ppb
  • Messbereich: 0-2000 ppb (N2/Ar), 0-500 ppb (H2), 0-1200 ppb (O2)
  • Eingangsdruck: 2-10 bar
  • Durchfluss: 100 ml/min
Tracer 2™ Specifications:
Operating range:Inerts: 0 - 2000 ppb
Oxygen: 0 - 1200 ppb
Hydrogen: 0 - 500 ppb
Cell - 700 ppt LDL
Sensor:MEECO Counter flow Cell
(U.S. Patent No.s 5225065 and 5198094)
Accuracy:Inert Mode: 4% of reading or ± 4 ppb, whichever is greater.
H2/O2 Mode: When the value is < 50 ppb, the accuracy is 6% of reading or ±6 ppb, whichever is greater.
When the value is >50 ppb, the accuracy is 2% of reading or ±20 ppb, whichever is greater.
Alarms:Two configurable alarms. Can be set anywhere within the operating range.
Alternately, use it as a responsiveness check or gas trend indicator. One system alarm for cell responsiveness and flow.
Flow Control:Provided by NIST traceable mass flow controllers.
Required Flow: 1200 SCCM minimum
Low Detection Limit:1 ppb at 95% Confidence Limit
Mounting:Standard 7" X 19" Rack Mount for up to two TRACER 2 units
Environmental Conditions:+10° to +40° Celsius
+50° to +104° Fahrenheit
20% to 80% RH, non-condensing, non-corrosive atmosphere
Optimal performance is achieved when temperature fluctuation is maintained below +/-2°C.
Sample Gas:Air, Argon, Carbon Dioxide, Carbon Tetrafluoride*, Helium, Hydrogen, Methane*, Neon, Nitrogen, Krypton, Sulfur Hexafluoride, Oxygen, Xenon, non-corrosive/non- toxic gases.
(* these gases may require special handling. Please consult factory before use.
Sample Inlet Pressure:30 - 150 psig (2 -10.2 Bar)**
**For lower pressure, consult factory
Sensitivity:0.5 ppb or below
Signal Output:One 0-5V DC and 4-20m A analog output: user defied and scaled.
RS-232 serial communication port, two level and one system alarm
User Interface:2-line X 20 character Vacuum
Fluorescent Display
5-key Membrane Keypad
Speed Response:Response to 5 ppb intrusion is 50% in 15 minutes.
Configuration:TRACER 2 DUO: Two TRACER 2s in one 7" X 19" rack mount box.
© 2020 Rainer Lammertz